Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6342444 | Method of forming diffusion barrier for copper interconnects | Kazuyuki Higashi, Hiroshi Toyoda, Akihiro Kajita, Tetsuo Matsuda, Hisashi Kaneko | 2002-01-29 |
| 6313037 | Semiconductor device and method for manufacturing the same | Akihiro Kajita, Kazuyuki Higashi | 2001-11-06 |
| 6291891 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima, Hisashi Kaneko +5 more | 2001-09-18 |
| 5759915 | Method of forming semiconductor device having an improved buried electrode formed by selective CVD | Hideki Shibata, Tadashi Matsuno, Takamasa Usui | 1998-06-02 |