Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7794922 | Pattern forming method and method of manufacturing semiconductor device | Shinichi Ito, Daisuke Kawamura, Yasunobu Onishi | 2010-09-14 |
| 7742150 | Manufacturing method of semiconductor device | Shinichi Ito, Daisuke Kawamura | 2010-06-22 |
| 7423728 | Immersion exposure method and apparatus, and manufacturing method of a semiconductor device | Takuya Kono, Shinichi Ito | 2008-09-09 |
| 6225033 | Method of forming a resist pattern | Yasunobu Onishi, Shoji Mimotogi, Katsuya Okumura | 2001-05-01 |
| 6045981 | Method of manufacturing semiconductor device | Akiko Mimotogi, Shoji Mimotogi, Soichi Inoue | 2000-04-04 |