Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9273387 | Member covered with hard coating | Kenji Yamamoto, Yoshiro Iwai | 2016-03-01 |
| 7384484 | Substrate processing method, substrate processing apparatus and substrate processing system | Yusuke Muraoka, Kimitsugu Saito, Tomomi Iwata, Eiji Fukatsu, Ikuo Mizobata +7 more | 2008-06-10 |
| 7335596 | Method for fabricating copper-based interconnections for semiconductor device | Takashi Onishi, Tatsuya Yasunaga, Hideo Fujii, Tetsuya Yoshikawa | 2008-02-26 |
| 5896012 | Metal ion plasma generator having magnetic field forming device located such that a triggering is between the magnetic field forming device and an anode | Alexander Elkind, James R. Treglio | 1999-04-20 |
| 5859500 | Metal ion plasma generator having rotatable anode plate | Alexander Elkind, James R. Treglio | 1999-01-12 |
| 5404017 | Ion implantation apparatus | Noriyuki INUISHI, Tadashi Kumakiri, Kouichirou Akari | 1995-04-04 |
| 5269896 | Cathodic arc deposition system | Tadashi Kumakiri, Tatsuya Tanaka | 1993-12-14 |