Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953939 | Testing apparatus using scanning electron microscope | Tetsuo Abe, Kouki Okawauchi, Tadashi Hattori, Hironori Fujita, Minoru Takeda +4 more | 2005-10-11 |
| 6904164 | Method of inspecting accuracy in stitching pattern elements | Manabu Saito, Akira Tohyama | 2005-06-07 |
| 6831278 | System and method for electron beam irradiation | Masanobu Yamamoto, Hiroshi Kawase, Jun Sasaki, Minoru Takeda, Gakuo Komatsubara +2 more | 2004-12-14 |
| 6737660 | Electron beam irradiation apparatus and electron beam irradiating method | Yoshihisa Miura, Yuichi Aki, Hiroshi Kawase, Masanobu Yamamoto, Naoki Date +2 more | 2004-05-18 |
| 6734437 | System and method for electron beam irradiation | Toshiaki Miyokawa, Naoki Date, Jun Sasaki, Yuichi Aki, Yoshihisa Miura | 2004-05-11 |
| 5801382 | Method of analyzing foreign materials | Osamu Noda | 1998-09-01 |
| 5185530 | Electron beam instrument | Hiroshi Shimada | 1993-02-09 |
| 4990778 | Scanning electron microscope | — | 1991-02-05 |
| 4547669 | Electron beam scanning device | Seiichi Nakagawa | 1985-10-15 |
| 4439681 | Charged particle beam scanning device | Naoki Date | 1984-03-27 |
| 4417145 | Apparatus for controlling magnetic field intensity | — | 1983-11-22 |
| 4393309 | Method and apparatus for controlling the objective lens in a scanning electron microscope or the like | — | 1983-07-12 |