Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7788882 | Packaging device and packaging method for hollow cathode type sputtering target | Takeo Okabe | 2010-09-07 |
| 5772860 | High purity titanium sputtering targets | Susumu Sawada, Hideaki Fukuyo | 1998-06-30 |
| 5693203 | Sputtering target assembly having solid-phase bonded interface | Tateo Ohhashi, Hideaki Fukuyo, Ichiroh Sawamura, Kenichirou Nakamura, Atsushi Fukushima | 1997-12-02 |
| 5456815 | Sputtering targets of high-purity aluminum or alloy thereof | Hideaki Fukuyo, Susumu Sawada | 1995-10-10 |