Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12384365 | Lane change prediction system and lane change prediction method | Taku Umeda, Takuji MORIMOTO, Tomoki Uno | 2025-08-12 |
| 12088217 | Power conversion device, transport system, power conversion method, non-transitory computer-readable storage medium with a program stored thereon, and diagnosis device | Ryohei Hashimoto, Masatoshi Fujikawa | 2024-09-10 |
| 11924954 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Takayuki Yabu | 2024-03-05 |
| 11228156 | Laser system and extreme ultraviolet light generation system | Yoshifumi Ueno | 2022-01-18 |
| 11219116 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuichi Nishimura, Takayuki Yabu, Yoshifumi Ueno | 2022-01-04 |
| 11092896 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | — | 2021-08-17 |
| 10955751 | Extreme ultraviolet light generation apparatus and electronic device manufacturing method | Yoshifumi Ueno | 2021-03-23 |
| 10667376 | Target supply device, extreme ultraviolet light generation device, and target supply method | Yoshifumi Ueno | 2020-05-26 |
| 10375809 | Extreme ultraviolet light generation device and method for controlling extreme ultraviolet light generation device | Yoshifumi Ueno, Go Shirozu | 2019-08-06 |
| 10225917 | Target supply device and extreme ultraviolet light generating device | Takahisa FUJIMAKI, Takayuki Yabu, Fumio Iwamoto, Yutaka Shiraishi | 2019-03-05 |