Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11900042 | Stochastic-aware lithographic models for mask synthesis | Kevin Lucas, Ulrich Welling, Ulrich Klostermann, Zachary Adam Levinson | 2024-02-13 |
| 11468222 | Stochastic signal prediction in compact modeling | Lawrence S. Melvin, III | 2022-10-11 |
| 11415897 | Calibrating stochastic signals in compact modeling | Zachary Adam Levinson, Ulrich Welling | 2022-08-16 |
| 11402742 | Undercut EUV absorber reflective contrast enhancement | Lawrence S. Melvin, III | 2022-08-02 |
| 11314171 | Lithography improvement based on defect probability distributions and critical dimension variations | Lawrence S. Melvin, III, Qiliang Yan, Ulrich Klostermann | 2022-04-26 |
| 11187973 | Reflective EUV mask absorber manipulation to improve wafer contrast | Lawrence S. Melvin, III | 2021-11-30 |
| 9754360 | Determination of spatial distribution of charged particle beams | Eric Lifshin | 2017-09-05 |