Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7800386 | Contact device and method for producing the same | Kiyoto Nakamura, Hiroshi Arikawa, Hirokazu Sampei | 2010-09-21 |
| 7554136 | Micro-switch device and method for manufacturing the same | Fumikazu Takayanagi, Hirokazu Sanpei | 2009-06-30 |
| 7276707 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi +2 more | 2007-10-02 |
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi +2 more | 2005-10-11 |
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Masato Muraki, Yuichi Iwasaki, Yoshinori Nakayama, Kouji Asano +1 more | 2004-11-16 |