| 11490499 |
Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same |
Sungho Jang, Hyuck Shin, Donghyub Lee, Kul Inn |
2022-11-01 |
| 10797051 |
Semiconductor device and method of manufacturing the same |
Cheol Kyu Kim, Yong-Hoon Son, Jin-Hyuk Yoo, Woojin Jung |
2020-10-06 |
| 10553582 |
Semiconductor device and method of manufacturing the same |
Cheol Kyu Kim, Yong-Hoon Son, Jin-Hyuk Yoo, Woojin Jung |
2020-02-04 |
| 10151330 |
Three-stage hydraulic actuator and method of operating the same |
Taehyeong Kim, Changwon Shul, Jaechang Ha |
2018-12-11 |
| 10103030 |
Methods of fabricating semiconductor devices |
Hyo-Sun Min, Sooho Shin, Sunghee Han |
2018-10-16 |
| 9012326 |
Methods for patterning microelectronic devices using two sacrificial layers |
Nam-Gun Kim, Sungil Cho |
2015-04-21 |
