Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362200 | Supercritical fluid processing apparatus and substrate processing system including the same | Seohyun Kim, Ohchel Kwon, Sangwoo Kim, Youngchan Kim, Hyunchul Kim +5 more | 2025-07-15 |
| 12191190 | Substrate processing chamber, substrate processing system including the same, and substrate processing method using the same | Hyunjin Ko, Seohyun Kim, Jae Seong RYU, Inkwang BAE, Seungbu BAEK | 2025-01-07 |
| 10361100 | Apparatus and methods for treating a substrate | Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim +2 more | 2019-07-23 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Yong-Jhin Cho, Jung-Min Oh, Yongsun Ko, Kuntack Lee, Hyosan Lee | 2018-04-03 |
| 9627233 | Substrate treating apparatus | Seokhoon Kim, Yongsun Ko, Kyoungseob Kim, Jung-Min Oh, Kuntack Lee +2 more | 2017-04-18 |
| 9534839 | Apparatus and methods for treating a substrate | Hyosan Lee, Yongsun Ko, Kyongseob Kim, Kwangsu Kim, Seokhoon Kim +2 more | 2017-01-03 |
| 9524864 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim +2 more | 2016-12-20 |
| 9027576 | Substrate treatment systems using supercritical fluid | Yong-Jhin Cho, Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim +3 more | 2015-05-12 |