Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10415135 | Thin film formation method and thin film formation apparatus | Kyokuyo Sai, Yoshiyuki Otaki, Ichiro Shiono, Yousong Jiang | 2019-09-17 |
| 8625111 | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter | Kyokuyo Sai, Yoshiyuki Otaki, Yousong Jiang | 2014-01-07 |