Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9070536 | Plasma reactor electrostatic chuck with cooled process ring and heated workpiece support surface | Michael D. Willwerth, David Palagashvili, Michael G. Chafin | 2015-06-30 |
YL
Ying-Sheng Lin
Overall (All Time): #3,059,230 of 4,157,543Top 75%
1
Patents All Time