Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306545 | Determining lithographic matching performance | Hadi YAGUBIZADE, Xiuhong Wei, Daan Maurits Slotboom, Jeonghyun Park, Sarathi ROY +3 more | 2025-05-20 |
| 11809088 | Method for controlling a lithographic apparatus | Hadi YAGUBIZADE, Min Seok Kim, Daan Maurits Slotboom, Jeonghyun Park, Jeroen COTTAAR | 2023-11-07 |