Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2024-01-30 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Jhin Cho, Yong-Sun Ko, Kwang-Wook Lee | 2020-10-27 |
| 10128246 | Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin | Sang-Jine Park, Bo-Un Yoon, Ha-Young Jeon, Ji-Won Yun, Won-Sang Choi | 2018-11-13 |
| 9704864 | Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin | Sang-Jine Park, Bo-Un Yoon, Ha-Young Jeon, Ji-Won Yun, Won-Sang Choi | 2017-07-11 |