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Xumou Xu

Applied Materials: 2 patents #3,641 of 7,310Top 50%
Overall (All Time): #2,075,990 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8501395 Line edge roughness reduction and double patterning Huixiong Dai, Christopher S. Ngai 2013-08-06
8293460 Double exposure patterning with carbonaceous hardmask Hui-Wan Chen, Chorng-Ping Chang, Yongmei Chen, Huixiong Dai, Jiahua Yu +7 more 2012-10-23