Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8398355 | Linearly distributed semiconductor workpiece processing tool | Izya Kremerman, Christopher Hofmeister, Richard J. Pickreign | 2013-03-19 |
| 6365025 | Method for depositing and/or removing material on a substrate | Chiu H. Ting | 2002-04-02 |
| 6187152 | Multiple station processing chamber and method for depositing and/or removing material on a substrate | Chiu H. Ting | 2001-02-13 |
| 6183611 | Method and apparatus for the disposal of processing fluid used to deposit and/or remove material on a substrate | Chiu H. Ting | 2001-02-06 |
| 6179982 | Introducing and reclaiming liquid in a wafer processing chamber | Chiu H. Ting, Richard W. Brodowski, Joseph Wytman | 2001-01-30 |
| 6077412 | Rotating anode for a wafer processing chamber | Chiu H. Ting, Wen-Cheng Ko | 2000-06-20 |
| 6022465 | Apparatus and method utilizing an electrode adapter for customized contact placement on a wafer | Chiu H. Ting, Wen-Cheng Ko | 2000-02-08 |
| 6017437 | Process chamber and method for depositing and/or removing material on a substrate | Chiu H. Ting, Wen-Cheng Ko, Kenneth J. Lowery, Peter Cho | 2000-01-25 |
| 6017820 | Integrated vacuum and plating cluster system | Chiu H. Ting | 2000-01-25 |
| 5704613 | Methods for sealing and unsealing using a magnetically permeable solid-based medium | — | 1998-01-06 |
| 5660397 | Devices employing a liquid-free medium | — | 1997-08-26 |