Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764713 | Method of processing a wafer using a compliant wafer chuck | — | 2004-07-20 |
| 6454864 | Two-piece chuck | — | 2002-09-24 |
| 6241825 | Compliant wafer chuck | — | 2001-06-05 |
| 6179982 | Introducing and reclaiming liquid in a wafer processing chamber | Chiu H. Ting, William H. Holtkamp, Richard W. Brodowski | 2001-01-30 |