Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903021 | Method of polishing a semiconductor device | Heinz Reinhardt, John V. H. Roberts, Harry McClain, Elmer Jensen | 2005-06-07 |
| 6899611 | Polishing pad for a semiconductor device having a dissolvable substance | Heinz Reinhardt, John V. H. Roberts, Harry McClain, Elmer Jensen | 2005-05-31 |
| 6860793 | Window portion with an adjusted rate of wear | Naoto Kubo | 2005-03-01 |
| 6517417 | Polishing pad with a transparent portion | John V. H. Roberts | 2003-02-11 |
| 6518188 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, David B. James | 2003-02-11 |
| 6488570 | Method relating to a polishing system having a multi-phase polishing layer | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-12-03 |
| 6439989 | Polymeric polishing pad having continuously regenerated work surface | Heinz Reinhardt, John V. H. Roberts, Harry McClain, Elmer Jensen | 2002-08-27 |
| 6375559 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-04-23 |
| 6375694 | Polishing slurry compositions capable of providing multi-modal particle packing | John V. H. Roberts, Lee Melbourne Cook | 2002-04-23 |
| 6337281 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2002-01-08 |
| 6245679 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik +1 more | 2001-06-12 |
| 6210254 | Method of manufacturing a polymeric polishing pad having photolithographically induced surface pattern(s) | Lee Melbourne Cook, David B. James, Nina G. Chechik | 2001-04-03 |
| 6210525 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2001-04-03 |
| 6099394 | Polishing system having a multi-phase polishing substrate and methods relating thereto | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. | 2000-08-08 |
| 6093649 | Polishing slurry compositions capable of providing multi-modal particle packing and methods relating thereto | John V. H. Roberts, Lee Melbourne Cook | 2000-07-25 |
| 6069080 | Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like | David B. James, John V. H. Roberts, Michael R. Oliver, Nina G. Chechik, Richard M. Levering, Jr. +1 more | 2000-05-30 |
| 6036579 | Polymeric polishing pad having photolithographically induced surface patterns(s) and methods relating thereto | Lee Melbourne Cook, David B. James, Nina G. Chechik | 2000-03-14 |
| 6030899 | Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, David B. James | 2000-02-29 |
| 6022264 | Polishing pad and methods relating thereto | Lee Melbourne Cook, David B. James | 2000-02-08 |
| 5932486 | Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, David B. James | 1999-08-03 |
| 5900164 | Method for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelements | Elmer Jensen, Harry McClain, John V. H. Roberts, Heinz Reinhardt | 1999-05-04 |
| 5578362 | Polymeric polishing pad containing hollow polymeric microelements | Heinz Reinhardt, John V. H. Roberts, Harry McClain, Elmer Jensen | 1996-11-26 |
| 5384337 | Poromeric material having uniformly distributed electrets for maintaining an electrostatic charge | — | 1995-01-24 |
| 5016483 | Method and apparatus for determination and display of critical gas supply information | — | 1991-05-21 |
| 4970897 | Method and apparatus for determination and display of gas consumption time | — | 1990-11-20 |