Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903021 | Method of polishing a semiconductor device | Heinz Reinhardt, John V. H. Roberts, William D. Budinger, Elmer Jensen | 2005-06-07 |
| 6899611 | Polishing pad for a semiconductor device having a dissolvable substance | Heinz Reinhardt, John V. H. Roberts, William D. Budinger, Elmer Jensen | 2005-05-31 |
| 6439989 | Polymeric polishing pad having continuously regenerated work surface | Heinz Reinhardt, John V. H. Roberts, William D. Budinger, Elmer Jensen | 2002-08-27 |
| 5900164 | Method for planarizing a semiconductor device surface with polymeric pad containing hollow polymeric microelements | William D. Budinger, Elmer Jensen, John V. H. Roberts, Heinz Reinhardt | 1999-05-04 |
| 5578362 | Polymeric polishing pad containing hollow polymeric microelements | Heinz Reinhardt, John V. H. Roberts, William D. Budinger, Elmer Jensen | 1996-11-26 |