| 6903262 |
Shielding element for electric and/or electronic components of an electric and/or electronic circuit |
— |
2005-06-07 |
| 6775471 |
Method and device for thermally treating objects |
Jochen Urban, Silke Paul, Uwe Ruby, Markus Hauf |
2004-08-10 |
| 6614005 |
Device and method for thermally treating substrates |
Heinrich Walk, Roland Mader, Markus Hauf |
2003-09-02 |
| 6316747 |
Apparatus for the thermal treatment of substrates |
Heinrich Walk |
2001-11-13 |
| 6311016 |
Substrate temperature measuring apparatus, substrate temperature measuring method, substrate heating method and heat treatment apparatus |
Syusaku Yanagawa |
2001-10-30 |
| 5965047 |
Rapid thermal processing (RTP) system with rotating substrate |
Peter Gruenwald, Michael Maurer, Helmut Merkle, Thomas Theiler, Heinrich Walk |
1999-10-12 |
