Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514014 | High density plasma chemical vapor deposition process | Chih-Chien Liu, Ta-Shan Tseng, J. Y. Wu, Water Lur, Shih-Wei Sun | 2009-04-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7514014 | High density plasma chemical vapor deposition process | Chih-Chien Liu, Ta-Shan Tseng, J. Y. Wu, Water Lur, Shih-Wei Sun | 2009-04-07 |