Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515177 | Circulating EFEM | Hiroshi Igarashi, Mutsuo Sasaki | 2022-11-29 |
| 11145529 | EFEM and method of introducing replacement gas thereinto | Hiroshi Igarashi | 2021-10-12 |
| 11133208 | EFEM and method of introducing dry air thereinto | — | 2021-09-28 |
| 11049736 | Circulating EFEM | Hiroshi Igarashi, Mutsuo Sasaki | 2021-06-29 |
| 10566227 | Controlling method for a wafer transportation part and a load port part on an EFEM | Hidetoshi Horibe | 2020-02-18 |
| 10340157 | Mini-environment apparatus | Hidetoshi Horibe | 2019-07-02 |
| 10304702 | EFEM | Hidetoshi Horibe | 2019-05-28 |
| 10090182 | Load port device and cleaning gas introducing method into a container on a load port | Koichiro Oikawa | 2018-10-02 |
| 9401295 | Load port apparatus and clamping device to be used for the same | Hiroshi Igarashi | 2016-07-26 |
| 9349627 | Lid opening/closing system for closed container and substrate processing method using same | Jun Emoto | 2016-05-24 |
| 8893753 | Substrate storage pod and lid member thereof, and processing apparatus for a substrate | Hiroshi Igarashi | 2014-11-25 |
| 8876173 | Substrate storage pod and lid opening/closing system for the same | Hiroshi Igarashi, Toshihiko Miyajima | 2014-11-04 |
| 8657346 | Lid opening/closing system for closed container | Toshihiko Miyajima, Hiroshi Igarashi | 2014-02-25 |
| 8528947 | Closed container and lid opening/closing system therefor | Hiroshi Igarashi, Toshihiko Miyajima | 2013-09-10 |
| 8522836 | Substrate storage pod with replacement function of clean gas | Toshihiko Miyajima | 2013-09-03 |
| 8413693 | Lid opening/closing system of an airtight container | — | 2013-04-09 |
| 8375998 | Lid opening/closing system of an airtight container | — | 2013-02-19 |
| 8322759 | Closed container and lid opening/closing system therefor | Toshihiko Miyajima, Hiroshi Igarashi | 2012-12-04 |
| 8302637 | Method of processing an object in a container and lid opening/closing system used in the method | Jun Emoto, Tomoshi Abe | 2012-11-06 |
| 8186927 | Contained object transfer system | Toshihiko Miyajima, Hiroshi Igarashi | 2012-05-29 |
| 8171964 | Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus | — | 2012-05-08 |
| 8083456 | Contained object transfer system | Toshihiko Miyajima | 2011-12-27 |
| 8082955 | Lid opening/closing system of an airtight container | — | 2011-12-27 |
| 8061738 | Gas replacement system | Toshihiko Miyajima, Hitoshi Suzuki | 2011-11-22 |
| 7841371 | Lid opening/closing system of an airtight container | — | 2010-11-30 |