Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12415821 | Tin compound, thin-film forming raw material containing said compound, thin film formed from said thin-film forming raw material, method of producing said thin film using said compound as precursor, and method of producing said thin film | Yoshiki OOE, Atsushi Yamashita | 2025-09-16 |
| 12371778 | Cobalt compound, thin-film forming raw material, thin-film, and method of producing thin-film | Keisuke Takeda, Atsushi Yamashita | 2025-07-29 |
| 12275748 | Amidinate compound, dimer compound thereof, thin-film forming raw material, and method of producing thin film | Yoshiki OOE, Keisuke Takeda, Ryota FUKUSHIMA, Chiaki MITSUI, Atsushi Yamashita | 2025-04-15 |
| 11760771 | Ruthenium compound, raw material for forming thin film, and method for producing thin film | Masaki ENZU, Nana OKADA, Masako HATASE | 2023-09-19 |
| 11623935 | Raw material for forming thin film by atomic layer deposition method, method of producing thin film, and alkoxide compound | Atsushi Sakurai, Masako HATASE, Akihiro Nishida, Atsushi Yamashita | 2023-04-11 |
| 11618762 | Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound | Nana OKADA, Akihiro Nishida, Atsushi Yamashita | 2023-04-04 |
| 11555044 | Thin-film forming raw material for use in atomic layer deposition method, thin-film forming raw material, method for producing thin-film, and compound | Nana OKADA, Atsushi Yamashita | 2023-01-17 |
| 11161867 | Compound, raw material for forming thin film, method for manufacturing thin film, and amidine compound | Nana OKADA, Akihiro Nishida, Atsushi Yamashita | 2021-11-02 |
| 10920313 | Diazadienyl compound, raw material for forming thin film, and method for manufacturing thin film | Masaki ENZU, Akihiro Nishida, Atsushi Yamashita | 2021-02-16 |
| 10882874 | Vanadium compound | Makoto Okabe, Akihiro Nishida | 2021-01-05 |
| 10364495 | Method for producing a thin film | Atsushi Sakurai, Tsubasa Shiratori, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida | 2019-07-30 |
| 10351584 | Alkoxide compound, raw material for forming thin film, method for manufacturing thin film, and alcohol compound | Atsushi Sakurai, Masako HATASE, Masaki ENZU | 2019-07-16 |
| 10253408 | Compound, thin film-forming material, and thin film manufacturing method | Masaki ENZU, Akihiro Nishida, Nana SUGIURA | 2019-04-09 |
| 10167304 | Ruthenium compound, material for thin film formation, and process for thin film formation | Masako HATASE, Masaki ENZU, Atsushi Sakurai | 2019-01-01 |
| 10155784 | Alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Tsubasa Shiratori, Akio Saito | 2018-12-18 |
| 10118940 | Alkoxide compound and raw material for forming thin film | Senji Wada, Akio Saito | 2018-11-06 |
| 10011623 | Alkoxide compound, thin film-forming starting material, and thin film formation method | Atsushi Sakurai, Masako HATASE, Masaki ENZU | 2018-07-03 |
| 9994593 | Copper compound, starting material for forming thin film, and method for manufacturing thin film | Masaki ENZU, Atsushi Sakurai, Akihiro Nishida, Makoto Okabe | 2018-06-12 |
| 9896468 | Metal alkoxide compound, thin-film-forming material, method for producing thin film, and alcohol compound | Atsushi Sakurai, Masako HATASE, Naoki Yamada, Tsubasa Shiratori, Akio Saito | 2018-02-20 |
| 9663538 | Aluminum compound, thin-film forming raw material, and method for producing thin film | Atsushi Sakurai, Tsubasa Shiratori, Masako HATASE, Hiroyuki Uchiuzou, Akihiro Nishida | 2017-05-30 |
| 9359383 | β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same | Youn-Joung Cho, Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai +5 more | 2016-06-07 |
| 9359382 | β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same | Youn-Joung Cho, Senji Wada, Jung-Sik Choi, Jin Seo Lee, Atsushi Sakurai +5 more | 2016-06-07 |