Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930037 | Process for forming a metal interconnect | Yasuaki Tsuchiya | 2005-08-16 |
| 6867139 | Method of manufacturing semiconductor device | — | 2005-03-15 |
| 6725119 | Cleaning-apparatus line configuration and designing process therefor | — | 2004-04-20 |
| 6585568 | Chemical mechanical polishing slurry | Yasuaki Tsuchiya, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-07-01 |
| 6585786 | Slurry for chemical mechanical polishing | Yasuaki Tsuchiya, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-07-01 |
| 6530968 | Chemical mechanical polishing slurry | Yasuaki Tsuchiya, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2003-03-11 |
| 6478834 | Slurry for chemical mechanical polishing | Yasuaki Tsuchiya, Tetsuyuki Itakura, Shin Sakurai, Kenichi Aoyagi | 2002-11-12 |
| 6436811 | Method of forming a copper-containing metal interconnect using a chemical mechanical planarization (CMP) slurry | Yasuaki Tsuchiya | 2002-08-20 |
| 6319801 | Method for cleaning a substrate and cleaning solution | Hidemitsu Aoki | 2001-11-20 |