| 6698992 |
Elastically expandable positioning device |
Kung Chris Wu, Chawshiang Wu, John M. Rush |
2004-03-02 |
| 6655423 |
Unified pod quick-opening apparatus |
John M. Rush, Chawshiang Wu, Kung Chris Wu |
2003-12-02 |
| 6610993 |
Load port door assembly with integrated wafer mapper |
Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt |
2003-08-26 |
| 6592317 |
Pod loader interface end effectors |
John M. Rush |
2003-07-15 |
| 6494666 |
Simplified and enhanced SCARA arm |
Kung Chris Wu, John M. Rush |
2002-12-17 |
| 6396072 |
Load port door assembly with integrated wafer mapper |
Eric Meyhofer, Kenneth A. Hardy, Cyril M. Kindt |
2002-05-28 |
| 6239963 |
Wafer support with electrostatic discharge bus |
— |
2001-05-29 |
| 6086323 |
Method for supplying wafers to an IC manufacturing process |
John M. Rush, Michael T. Verdon |
2000-07-11 |
| 5984610 |
Pod loader interface |
John M. Rush, Michael T. Verdon |
1999-11-16 |
| 5506744 |
Ionized airflow manifold for static reduction |
John M. Rush, Michael T. Verdon |
1996-04-09 |
| 5193969 |
Wafer transfer machine |
John M. Rush, Michael T. Verdon |
1993-03-16 |