Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482555 | Method of patterning sub-0.25&lgr; line features with high transmission, “attenuated” phase shift masks | J. Fung Chen, Roger Caldwell, Kurt E. Wampler | 2002-11-19 |
| 6312854 | "Method of patterning sub-0.25 lambda line features with high transmission, ""attenuated"" phase shift masks" | J. Fung Chen, Roger Caldwell, Kurt E. Wampler | 2001-11-06 |
| 6114071 | Method of fine feature edge tuning with optically-halftoned mask | J. Fung Chen, Kurt E. Wampler | 2000-09-05 |