Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7718590 | Method to remove resist, etch residue, and copper oxide from substrates having copper and low-k dielectric material | Tomoko Suzuki, Yasuo Katsuya, Chris Reid | 2010-05-18 |
| 7399365 | Aqueous fluoride compositions for cleaning semiconductor devices | Tetsuo Aoyama, Tomoko Suzuki | 2008-07-15 |
| 7341827 | Separation-material composition for photo-resist and manufacturing method of semiconductor device | Masafumi Muramatsu, Hayato Iwamoto, Kazumi Asada, Tomoko Suzuki, Tetsuo Aoyama | 2008-03-11 |
| 7250391 | Cleaning composition for removing resists and method of manufacturing semiconductor device | Itaru Kanno, Yasuhiro Asaoka, Masahiko Higashi, Yoshiharu Hidaka, Etsuro Kishio +3 more | 2007-07-31 |
| 7087563 | Resist stripping composition and method of producing semiconductor device using the same | Hayato Iwamoto, Ryuichi Kanamura, Ai Endou, Tomoko Suzuki | 2006-08-08 |