| 8121396 |
Assessing critical dimension and overlay tolerance |
— |
2012-02-21 |
| 8104342 |
Process condition measuring device |
Mei Sun, Mark Wiltse, Wayne G. Renken, Zachary Reid |
2012-01-31 |
| 7987057 |
Intelligent stitching boundary defect inspection |
— |
2011-07-26 |
| 7924408 |
Temperature effects on overlay accuracy |
Mei Sun, Mark Wiltse |
2011-04-12 |
| 7846266 |
Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology |
— |
2010-12-07 |
| 7408642 |
Registration target design for managing both reticle grid error and wafer overlay |
— |
2008-08-05 |
| 7202094 |
Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate |
— |
2007-04-10 |
| 6977183 |
Process for locating, displaying, analyzing, and optionally monitoring potential transient defect sites in one or more integrated circuit chips of a semiconductor substrate |
— |
2005-12-20 |