Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7227624 | Method and apparatus for monitoring the condition of plasma equipment | Steven Fink | 2007-06-05 |
| 7212078 | Method and assembly for providing impedance matching network and network assembly | — | 2007-05-01 |
| 7019253 | Electrically controlled plasma uniformity in a high density plasma source | Wayne Johnson, Eric J. Strang | 2006-03-28 |
| 7005842 | Probe cartridge assembly and multi-probe assembly | Steven Fink | 2006-02-28 |
| 6812646 | Method and device for attenuating harmonics in semiconductor plasma processing systems | Andrej Mitrovic, Wayne Johnson | 2004-11-02 |
| 6806650 | Structure and the method for measuring the spectral content of an electric field as a function of position inside a plasma | Wayne Johnson | 2004-10-19 |
| 6700458 | Device and method for coupling two circuit components which have different impedances | Andrej Mitrovic, Wayne L. Johson | 2004-03-02 |
| 6657395 | Close coupled match structure for RF drive electrode | — | 2003-12-02 |