| 8871312 |
Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber |
Jennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Senh Thach, Xiaoming He +1 more |
2014-10-28 |
| 8758858 |
Method of producing a plasma-resistant thermal oxide coating |
Jennifer Y. Sun, Li Xu, Kenneth S. Collins, Ren-Guan Duan, Senh Thach |
2014-06-24 |
| 8367227 |
Plasma-resistant ceramics with controlled electrical resistivity |
Jennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Senh Thach, Xiaoming He +1 more |
2013-02-05 |
| 8129029 |
Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating |
Jennifer Y. Sun, Li Xu, Kenneth S. Collins, Ren-Guan Duan, Senh Thach |
2012-03-06 |
| 5404263 |
All-glass header assembly used in an inflator system |
James A. Longwell |
1995-04-04 |
| 5046395 |
Two fault tolerant toggle-hook release |
Christopher W. Brown |
1991-09-10 |
| 4836081 |
Toggle release |
Robert Yang, Christopher W. Brown |
1989-06-06 |
| 4829235 |
Four-terminal connector for measuring resistance of a pyrotechnic initiator |
Robert Robinson, William Chris Hoffman |
1989-05-09 |
