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Method of coating a substrate and coating apparatus for coating a substrate |
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Method of coating a substrate and coating apparatus for coating a substrate |
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Electrode arrangement |
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2005-04-19 |
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Method and device for the determination of the gas permeability of a container |
Jurgen Henrich |
2005-02-22 |
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Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
Mark Rule, Yu Shi, Helmut Grimm, Elisabeth Budke |
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| 6720052 |
Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same |
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Vacuum chamber for flat substrates |
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2001-12-25 |
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Apparatus for the rapid evacuation of a vacuum chamber |
Wolfgang BUSCHBECK |
1999-12-21 |
| 5345207 |
Magnet configuration with permanent magnets |
— |
1994-09-06 |
| 5228838 |
Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof |
Wolfgang BUSCHBECK |
1993-07-20 |