Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6762412 | Optical apparatus, exposure apparatus using the same, and gas introduction method | Masayuki Akagawa | 2004-07-13 |
| 6727981 | Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method | Kyoji Nakamura, Eizo Ohya, Hiromitsu Yoshimoto | 2004-04-27 |
| 6671033 | Optical device, method of cleaning the same, projection aligner, and method of producing the same | Masayuki Akagawa, Osamu Yamashita | 2003-12-30 |
| 6288769 | Optical device method of cleaning the same, projection aligner, and method of producing the same | Masayuki Akagawa, Osamu Yamashita | 2001-09-11 |