Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10209623 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Yuho Kanaya, Tadashi Nagayama | 2019-02-19 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Yuho Kanaya, Tadashi Nagayama | 2016-07-05 |
| 9063438 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Yuho Kanaya, Tadashi Nagayama | 2015-06-23 |
| 8130361 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Yuho Kanaya, Tadashi Nagayama, Kenichi Shiraishi | 2012-03-06 |