Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211672 | Apparatus and method for plasma etching | Jongwoo Sun, Kyohyeok Kim, Haejoong Park, Jewoo Han | 2025-01-28 |
| 11984304 | Apparatus and method for plasma etching | Jongwoo Sun, Kyohyeok Kim, Haejoong Park, Jewoo Han | 2024-05-14 |