Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817242 | Exposure method and device manufacturing method, exposure apparatus, and program | Masaharu Kawakubo, Yuho Kanaya, Chiaki Nakagawa, Masahiko Akizuki | 2010-10-19 |
| 6813004 | Exposure method, exposure apparatus and making method of the apparatus, and device and manufacturing method of the device | Takahiro Horikoshi, Masahiro Nei | 2004-11-02 |