Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6900144 | Film-forming surface reforming method and semiconductor device manufacturing method | Kazuo Maeda, Setsu Suzuki, Kiyotaka Sasaki | 2005-05-31 |
| 6255230 | Method for modifying a film forming surface of a substrate on which a film is to be formed, and method for manufacturing a semiconductor device using the same | Hiroshi Ikakura, Syunji Nishikawa, Noboru Tokumasu | 2001-07-03 |
| 6212789 | Semiconductor device manufacturing system | Toshio Kato, Noboru Tokumasu | 2001-04-10 |
| 5855651 | Method for processing waste gas exhausted from chemical vapor and deposition equipment | Naoyasu Kurita, Kazuhisa Onozawa, Tsuyoshi Watanabe, Mitsutoshi Sasajima, Naoki Yamada | 1999-01-05 |
| 4976973 | Process for producing protein-rich fish meal and fish oil | Yoichi Shirakawa, Yoshio Minowa, Junichi Hisano | 1990-12-11 |