Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7737291 | Composition containing siloxane compound and phenol compound | Kunio Osasawara, Hiroki Sato, Takashi Higashino | 2010-06-15 |
| 6743933 | Process of forming thin film and precursor for chemical vapor deposition | Atsuya Yoshinaka, Naoki Yamada, Atsushi Sakurai | 2004-06-01 |
| 6547863 | Metal compound solution and thin film formation using the same | Naoki Yamada | 2003-04-15 |
| 6429325 | Copper material for chemical vapor deposition and process for forming thin film using the same | Toshiya Shingen | 2002-08-06 |
| 6316064 | Process of producing a ruthenium or ruthenium oxide thin film | Akifumi Masuko, Toshiya Shingen | 2001-11-13 |
| 5855651 | Method for processing waste gas exhausted from chemical vapor and deposition equipment | Naoyasu Kurita, Takayoshi Azumi, Tsuyoshi Watanabe, Mitsutoshi Sasajima, Naoki Yamada | 1999-01-05 |