Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6316064 | Process of producing a ruthenium or ruthenium oxide thin film | Kazuhisa Onozawa, Toshiya Shingen | 2001-11-13 |
| 6117487 | Process for forming metal oxide film by means of CVD system | Mitsuo Akutsu, Naohiro Kubota, Naoki Yamada | 2000-09-12 |