Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6255230 | Method for modifying a film forming surface of a substrate on which a film is to be formed, and method for manufacturing a semiconductor device using the same | Hiroshi Ikakura, Noboru Tokumasu, Takayoshi Azumi | 2001-07-03 |