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Sven Schwitalla

KL Kla-Tencor: 1 patents #809 of 1,394Top 60%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9747520 Systems and methods for enhancing inspection sensitivity of an inspection tool Shifang Li, Youxian Wen, Prashant Aji, Lena Nicolaides 2017-08-29