Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10388559 | Apparatus for depositing a layer on a substrate in a processing gas | Mohamed Elghazzali, Jurgen Weichart | 2019-08-20 |
| 10202682 | Method of sputtering and sputter system | Juergen Weichart | 2019-02-12 |
| 9624572 | Method of HIPIMS sputtering and HIPIMS sputter system | Juergen Weichart | 2017-04-18 |
| 9490166 | Apparatus and method for depositing a layer onto a substrate | Mohamed Elghazzali, Jurgen Weichart | 2016-11-08 |