Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125685 | Plasma processing apparatus | Jun-Soo Lee, Yoshihisa Hirano, Jae Hoon Kim, Young-Jin Noh, Seung Kyu Lim +2 more | 2024-10-22 |
| 11837496 | Substrate processing apparatus and method of processing a substrate | Jong-Woo Sun, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2023-12-05 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 9812293 | Dielectric window, plasma processing system including the window, and method of fabricating semiconductor device using the system | Jung Hwan Um, Dong Wook Kim | 2017-11-07 |