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Native or uncontrolled oxide reduction by HWCVD H* using specific metal chamber liner |
— |
2019-12-24 |
| 9887342 |
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| 9590161 |
Laser processing of superconductor layers |
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Methods for etching silicon using hydrogen radicals in a hot wire chemical vapor deposition chamber |
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2016-04-05 |
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Amit Chatterjee |
2014-12-09 |
| 8785304 |
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— |
2014-07-22 |
| 8642376 |
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2014-02-04 |
