Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9169828 | Method and device for electrical power generation from wind power and method of manufacture thereof | — | 2015-10-27 |
| 6087778 | Scalable helicon wave plasma processing device with a non-cylindrical source chamber having a serpentine antenna | Neil Benjamin, Russell F. Jewett | 2000-07-11 |
| 5948704 | High flow vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support | Neil M.P. Benjamin, Jon P. Hylbert | 1999-09-07 |
| 5820723 | Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support | Neil Benjamin, Jon P. Hylbert | 1998-10-13 |