Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9064686 | Method and apparatus for temporary bonding of ultra thin wafers | Gregory George | 2015-06-23 |
| 8353255 | Device for coating a substrate | Ralph Beyer, Rainer Targus | 2013-01-15 |
| 6979407 | Process for producing an SPM sensor | — | 2005-12-27 |
| 6958124 | SPM sensor and process for producing it | — | 2005-10-25 |
| 6953751 | Micro device and process for producing it | Manfred Detterbeck, Mathieu Burri, Theo Hartmann, Terunobu Akiyama | 2005-10-11 |
| 6780767 | Semiconductor component in a wafer assembly | — | 2004-08-24 |