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Rainer Targus

SG Suss Microtec Lithography Gmbh: 2 patents #18 of 59Top 35%
📍 Leinfelden, DE: #78 of 230 inventorsTop 35%
Overall (All Time): #1,423,784 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
11504825 Holding apparatus and method for holding a substrate Thomas Grund 2022-11-22
11148258 Holding apparatus and method for holding a substrate Thomas Grund 2021-10-19
8353255 Device for coating a substrate Ralph Beyer, Stefan Lutter 2013-01-15