Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383410 | Selective silicon oxide etchant formulation including fluoride salt, chelating agent, and glycol solvent | William A. Wojtczak, Long Nguyen | 2002-05-07 |
| 6280651 | Selective silicon oxide etchant formulation including fluoride salt, chelating agent, and glycol solvent | William A. Wojtczak, Long Nguyen | 2001-08-28 |
| 6224785 | Aqueous ammonium fluoride and amine containing compositions for cleaning inorganic residues on semiconductor substrates | William A. Wojtczak, George Guan, Daniel Fine | 2001-05-01 |
| 6211126 | Formulations including a 1, 3-dicarbonyl compound chelating agent for stripping residues from semiconductor substrates | William A. Wojtczak, George Guan | 2001-04-03 |
| 5108875 | Photoresist pattern fabrication employing chemically amplified metalized material | James W. Thackeray | 1992-04-28 |
| 4921778 | Photoresist pattern fabrication employing chemically amplified metalized material | James W. Thackeray | 1990-05-01 |