Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5001423 | Dry interface thermal chuck temperature control system for semiconductor wafer testing | Anthony J. Abrami, Santiago del Puerto, Paul M. Gaschke, Mark R. LaForce, Paul J. Roggemann +1 more | 1991-03-19 |