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Silicide formation on a wafer |
Eric Gerritsen, Veronique De-Jonghe |
2016-06-28 |
| 8752228 |
Apparatus for cleaning of circuit substrates |
János Farkas, Sebastien Petitdidier, Kevin Cooper, Jan Van Hassel |
2014-06-17 |
| 8263430 |
Capping layer formation onto a dual damescene interconnect |
János Farkas, Lynne Michaelson |
2012-09-11 |
| 8257506 |
Pulsed chemical dispense system |
Olivier Dubreuil, Theodore Carambeeris |
2012-09-04 |
| 8097535 |
Fabrication of self-assembled nanowire-type interconnects on a semiconductor device |
Kevin Cooper |
2012-01-17 |
| 8066430 |
Semiconductor substrate temperature determination |
Meindert Martin Lunenborg, Jean-Philippe Jacquemin |
2011-11-29 |
| 7951729 |
Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereor, and material for coupling a dielectric layer and a metal layer in a semiconductor device |
János Farkas, Cindy Goldberg |
2011-05-31 |
| 7883393 |
System and method for removing particles from a polishing pad |
Sebastien Petitdidier, János Farkas, Silvio Del Monaco |
2011-02-08 |
| 7803719 |
Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereof, and passivating coupling material comprising multiple organic components for use in a semiconductor device |
János Farkas, Maria Luisa Calvo-Munoz |
2010-09-28 |
| 7691756 |
Semiconductor device including a coupled dielectric layer and metal layer, method of fabrication thereof, and material for coupling a dielectric layer and a metal layer in a semiconductor device |
János Farkas, Cindy Goldberg |
2010-04-06 |
| 7064053 |
Process for fabricating an electrical circuit comprising a polishing step |
Alain Inard, Céline Roussel, Philippe Gayet |
2006-06-20 |
| 6917116 |
Electrical connection device between two tracks of an integrated circuit |
Céline Roussel, Alain Inard |
2005-07-12 |
| 6528419 |
Process of fabricating an integrated circuit |
Joaquin Torres, Pascale Motte, Brigitte Descouts |
2003-03-04 |
| 6201291 |
Semiconductor device and method of manufacturing such a device |
Cornelis A. H. A. Mutsaers, Mareike Klee, Wilhelm A. Groen |
2001-03-13 |
