| 8729701 |
Copper diffusion barrier |
Nicolas Jourdan |
2014-05-20 |
| 8470685 |
Integration of self-aligned trenches in-between metal lines |
Laurent-Georges Gosset |
2013-06-25 |
| 8424177 |
MIM capacitor with enhanced capacitance |
Alexis Farcy, Maryline Thomas, Sonarith Chhun, Laurent-Georges Gosset |
2013-04-23 |
| 8399772 |
Control of carbon nanostructure growth in an interconnect structure |
Laurent-Georges Gosset |
2013-03-19 |
| 8143157 |
Fabrication of a diffusion barrier cap on copper containing conductive elements |
Laurent-Georges Gosset, Vincent Arnal, Sonarith Chhun |
2012-03-27 |
| 8138082 |
Method for forming metal interconnects in a dielectric material |
Vincent Arnal, Laurent-Georges Gosset, Wim Besling |
2012-03-20 |
| 8110879 |
Controlling lateral distribution of air gaps in interconnects |
Laurent-Georges Gosset |
2012-02-07 |
| 8072075 |
CuSiN/SiN diffusion barrier for copper in integrated-circuit devices |
Nicolas Jourdan, Laurant Georges Gosset |
2011-12-06 |
| 7989342 |
Formation of a reliable diffusion-barrier cap on a Cu-containing interconnect element having grains with different crystal orientations |
Laurent-Georges Gosset, Sonarith Chhun, Vincent Arnal |
2011-08-02 |
| 7816266 |
Copper diffusion barrier |
Nicolas Jourdan |
2010-10-19 |
| 7630191 |
MIM capacitor |
Sonarith Chhun, Laurent-Georges Gosset |
2009-12-08 |
| 7605071 |
Controlling lateral distribution of air gaps in interconnects |
Laurent-Georges Gosset |
2009-10-20 |
| 7553739 |
Integration control and reliability enhancement of interconnect air cavities |
Laurent-Georges Gosset |
2009-06-30 |
| 7172980 |
Process for fabricating an integrated electronic circuit that incorporates air gaps |
Vincent Arnal, Laurent-Georges Gosset |
2007-02-06 |
| 6846690 |
Integrated circuit comprising an auxiliary component, for example a passive component or a microelectromechanical system, placed above an electronic chip, and the corresponding fabrication process |
Alexis Farcy, Philippe Coronel, Pascal Ancey |
2005-01-25 |
| 6828646 |
Isolating trench and manufacturing process |
Michel Marty, Francois Leverd, Philippe Coronel |
2004-12-07 |
| 6528419 |
Process of fabricating an integrated circuit |
Srdjan Kordic, Pascale Motte, Brigitte Descouts |
2003-03-04 |